Device Characterization and Modeling typically requires the abiltiy to probe multiple sites to generate data and to probe at varying temperatures. While all our products can find application in Device Characterization, there are some products that are especially applicable. These include:
- Semi-automatic Probe stations
- H1000 Thermal Chucks
Of particular importance to this application is the ability to probe small targets and to step and repeat accurately so that many data points may be taken without an operator attending the station. Micromanipulator probe stations provide high resolution (to 0.1 micron) and high stability of both the probe station and the system microscope. Semi-automatic stations provide an easy software interface via GPIB, RS-232 or Windows DDE to parametric testers and analysis software.
Our high resolution manual model 2525 manipulators are especially well suited to this application. Triaxial probe holders provide low current and low voltage (Kelvin) capability. Probe tips are available with low contact resistance and tip radii to 50 nm.