High voltage/high current systems are typically used for silicon carbide based semiconductors used for power devices and devices designed for extreme environmental conditions (aerospace/well logging). Silicon carbide is used for high power and high temperature devices because it has

• High thermal conductivity (can withstand up to 2000°C)
• Good electron mobility
• Excellent mechanical hardness
• Over 10x the dielectric breakdown strength of silicon
• Larger band gap than silicon
• Inert chemical properties

Typical Test Requirements

• High temperature thermal chuck (+400° to +500° C)
• High voltage probes (2.5 to 5Kvolts or above at 1mA)
• High current probes (1-3 amps at 10VDC)
• Safe station use (safety interlocks and high isolation components)

Micromanipulator has delivered integrated high voltage and high current probe station solutions to meet these requirements since 1997. The integrated approach insures that safety and operational requirements are met while providing the user with the capabilities normally associated with high performance probe stations.

High isolation H1000 thermal chucks, triaxial probe holders, probe card holder and probe station components insure that high voltage and high current is confined to the test area and does not arc to station parts. High isolation chuck area plates can provide light and moisture shielding for controlling the environment of the test area. An interlock light/EMI/RFI shield with interlock provides even more protection to users.

Micromanipulator has a wide range of probe tips which may be used in high voltage and high current tests. The model 7B tungsten probe tips have a tip radius range from 0.5µm to 200µm to provide a higher contact area. These tips may be gold or platinum plated to eliminate tungsten oxide issues and improve the conductivity of the probe tip. The model 7D tungsten carbide tip with a tip radius of 5µm may also be used for high temperature probing.

Custom probe tips are also available to exact user specifications and may be made from high conductivity/high temperature materials. Custom probe holders are also available should the standard high voltage probe holder not meet the user requirements.

High voltage / high current stations are available in manual, motorized or programmable versions. Motorized or semiautomatic programmable systems with remote control are highly recommended for use in light/EMI/RFI enclosures. Motorized or programmable stations may allow the user to control all aspects of the station motion (X-Y stage, Z platen, X-Y-Z microscope, X-Y-Z motorized manipulators) away from the actual test area.

The Micromanipulator system approach insures that the test system is set up right to insure safety.