Micromanipulator offers probe stations, thermal chuck systems and high temperature probe holders to insure proper operation of the complete test system.
The 4000, 8000 and P200-300 series probe stations have integrated thermal chuck plumbing and electrical connections to control drag on the wafer chuck/stage system and insure correct movement.
The Micromanipulator H1000 thermal chucks are designed to protect samples and high cost probe cards with designs to control expansion in the Z axis. The H1000 chucks also protect the probe station mechanical and electrical components from thermal chuck heat and cold.
Micromanipulator also offers high temperature probe holders to insure rock solid positioning over long times and a large temperature range.
In addition Micromanipulator stations support high temperature Celadon Multisite probe cards and the Versatile systems.
Typical applications which use high (0 to +400°C) or low (<0°C) temperature testing conditions
Station Temperature Range
|Field Failure Analysis||X||-|
|Production Failure Analysis||X||-|
|Wafer Level Reliability||X||X|
|Product Test Developmen||X||-|
|Silicon Carbide Performance||X||-|
|MEMS Motion Analysis||X||X|
|Biological Surgery / Transfers||-||X|
High Temperature Probes/Probe Holders
|Station||Chuck Size||Temperature Range|
|4000/8000/P200 Series||6/8" (150/200mm)||-65° to +400°C|
(+500°C as a special)
|P300 300mm Series||12" (300mm)||-55° to 300°C|
Most probes and probe holders may be used in test configurations where the probe/probe holder does not exceed 100°C for moderate periods of time. For applications where high temperatures (>100°C) are require for long periods of time it is recommended to use a high temperature probe/probe holder.
Please note that probe/probe holder temperatures are typically lower than thermal chuck temperatures, especially if the probe/probe holder is some distance from the surface of the chuck, heat shielding plates are used between the probe/probe holder and the surface of the thermal chuck, air is allowed to circulate around the probe/probe holder, and an actively cooled platen is used.
The chart below assumes that these techniques are used to reduce the probe/probe holder temperature.
Compliant Probe Tips
|High Temperature Range|
|Typical Chuck Range|
|0 or 00||+400||+400|
|44 High Frequency||+200||+400|
|75 General Purpose||+250||+400|
|77A General Purpose||+250||+400|
|78 Glass Epoxy||+150||+200|
|79-H High Temp. Ceramic||+250||+400|
|80 Coaxial Probe Head||+200||+300|
|83 High Performance||+250||+400|
Compliant probe tips flex with changes in position due to thermal expansion and contraction. Below is a list of compliant probe tips ranked from the most to the least compliant.
H1000 Thermal Chuck Systems
Micromanipulator offers a wide range of thermal chuck systems.
- Power supplies and controllers may be either low noise AC or ultra-low noise DC.
- Chuck sizes may be 6", 8" and 12" (150, 200, 300mm).
- Cooling units may be either lab-water, lab-air, 0°C chiller or -65°C chiller.
- Control may be either through front panel manual controls, pcTC software or RS422/RS232/GPIB remote commands.
Moisture shielding is available for the 4000, 8000 and P200-300, series stations. Moisture shields must be used in combination with dry air or nitrogen to inhibit condensation or frosting.