The 8000 series high performance stations have a wide range of accessories and options. Below are listed some of the most commonly used.
The 8000 series stations are designed to support a wide range of microscopes. Typical microscopes used for analytical probing are Mitutoyo FS70, US Microscope Company, Seiwa, Motic, Thales-Optem A-Zoom, and Sterozoom microscopes. All of these microscopes are available through Micromanipulator. Special versions of microscopes may be required for laser cutting, micro-motion analysis and emission detection systems.
Ambient chucks include combinations of the following:
- 6 and/or 8” (150 and 200mm) wafer sizes
- High isolation coaxial or triaxial configurations
- Gold or stainless steel vacuum surfaces
- With or without lift pins
Thermal chuck systems are available with and without lift pins and in coaxial and triaxial versions. Low noise DC or AC power supplies are used depending upon the specific application. The triaxial chuck and DC power supply combination is used for the most demanding low current measurements.
A range of temperatures are available:
- 10 to 15° above room temperature to +400°C
- 0° to +400°C chiller system
- -65° to +400°C chiller system
RF/microwave chucks are available with dual calibration substrate holders (CTAB-8000.
High voltage triaxial chucks are available in either 6 or 8” (150 or 200mm) sizes. These chucks provide high voltage isolation between the radiator ring the chuck surface, and include high voltage connections to the chuck surface. Both ambient and thermal chuck versions are available.
Single Die or Wafer Pieces Holder
The 8000 series stations may be used with a single die or small wafer pieces vacuum holder (VAC-PUC). This holder sits on the vacuum chuck and concentrates the vacuum into small vacuum holes on the holder surface. An electrical connection may be made through the station chuck connections and the VAC-PUC.
High Voltage System
High voltage 8000 series station systems are available which incorporate changes needed to safely test wafers at high voltage. High voltage station modifications as well as modifications to chuck, probe card holder, probe holders, top-hat shielding plates and light/EMI/RFI enclosures insure a total system approach to high voltage testing.
Probe Card Holders
A range of probe card holders are available for the 8000 series stations. Standard and low noise versions are available for either 6 or 8 inch (150 and 200mm) stations. Fixed width 4.5 inch (11.4cm) probe card holders or adjustable probe card holders to hold cards from 4.5” to 6” (11.4 to 15.2 cm) wide are available.
Socket Stage Adapter
An adjustable socket stage adapter (8800-SSA) for the 8000 series probe stations is designed to hold socket cards with a width of 3.5" (8.9cm) to 6" (15.2cm). This adapter mounts on stage post and replaces the chuck. It allows for de-lidded packaged parts to be easy held and tested on the probe station.
Vibration isolation tables are available for the 8000 series stations. Micromanipulator recommends vibration isolation tables with front and back guard rails for safety requirements and for use with the light/EMI/RFI enclosure with sub-table system for maximum vibration control. Table tops are available with stainless steel, or black or white plastic surfaces. Integrated instrument rack mounts, arm rest pads, instrument/monitor/keyboard shelves, and leg casters are available options
Vibration isolation platforms are available for the 8000 series stations. A typical platform (2212-02013) has a 24 x 30 inch (61 x 76cm) black plastic top and is designed to hold 700lbs (318 Kg).
The 8000 series station microscope bridges are designed to support the weight of industry standard laser cutters. Micromanipulator distributes the New Wave Research wavelength selectable laser cutters.
The 8000 series station microscope bridges are designed to support the weight of micro-motion analysis systems from Polytec Inc. The bridge design dampens vibrations which may interfere with highly sensitive motion analysis.
Video and Image Enhancement Systems
A number of video systems are available for use with the 8000 series probe stations. These range from independent basic video camera/monitor combinations to video systems integrated with pcProbe II™ software to provide advanced control of the 8860 station.
A number of image enhancement systems are available which provide real-time processing of video images. These provide advantage especially when very high 200x objectives are used or when low light conditions prevail.
Light/EMI/RFI and Moisture Enclosures
A number of options are available for light/EMI/RFI shielding for the 8000 series stations.
An entire station roll top enclosure (8800-LTE) is available. The roll-top enclosure may be used with a vibration isolation table with guard rails and sub-table system to allow the station to “float” inside the LTE for the maximum vibration isolation as well as the maximum light/EMI/RFI shielding.
Top-hat assemblies are available to provide shielding for the chuck/stage area with open access to manipulators and the 8000 series station controls.
A top-hat assembly (8800-TEMPSEAL) is available for moisture shielding of the 8000 series stations. This provides moisture shielding for the chuck/stage area by restricting air movement. When used with a dry air system dry air displaces moist air to reduce condensation on thermal chucks. A combination light/EMI/RFI and moisture shield (8800-DRYSHIELD) is also available.
Emission Microscope Systems
The 8000 series probe stations may be used with emission microscope systems such as the Micromanipulator FA-2000. The massive microscope bridge is designed to support the weight of emission microscopes and cameras.