H1000 Thermal Chucks

Add to Info Request List

For Larger View Click on Image

8" (200mm) & 300mm Thermal Chucks

Features & Benefits

High performance coaxial and super low noise triaxial versions:
Wide chuck selection to fit test requirements and performance needs
High temperature platinum chuck surface:
Superior electrical connections with high temperature performance
High isolation and low capacitance designs:
Capable of demanding low current - low noise measurements
Quiet AC and super low noise DC power supply/controllers:
Wide selection to fit test requirements and performance needs
Employs proportional, integral, derivative (PID) control:
Provides precise temperature control and low noise while reducing temperature overshoot
Front panel controls or optional control software:
Easy editing and programming of temperatures
Built in RS-422 interface with optional RS-232 and IEE-488 interfaces:
Flexible configurations with control systems
Optional lift pin versions:
Place and remove wafers easily without wafer sliding

The H1000 Thermal Chuck System has been specifically designed for use with probing stations and features:

High Performance
Low Noise
Low Capacitance
High Isolation
Fast Cycling Times
Superior Temperature Uniformity
Modular Configurations

Patented High Performance Chucks
The Micromanipulator’s low leakage (triaxial) chucks feature a patented surface/guard design. With this unique design, the electrical “guard” of the chuck surface is integrated into the surface itself. There are no multiple layers to cause thermal conductivity and internally generated noise; no separate, raised guard to make loading a wafer more difficult; but most importantly, this “break through” design gives the lowest leakage and noise levels of any chuck in the industry while actually reducing chuck capacitance!

Design Concept, a System of Components
The H1000 series of thermal chucks was designed from over 45 years of probing and thermal chuck system experience. The result is a thermal chuck SYSTEM that integrates into the probing environment to provide not only sample thermal control, but one that maintains the accuracy and functionality of the probing station itself. This approach is evident in features such as:

External Cooling Shield Presents a cool surface around and under the chuck to minimize personnel burns and prevent transfer of the chuck heat to the probe station stage drive thus maintaining positioning accuracy, repeatability and enhancing the reality of the stage drive itself in both manual and programmable systems.

Plumbing Service Module External to the thermal chuck controller, this module routes the flow of coolant outside of the main controller rack removing the danger of coolant leaks on sensitive equipment in a rack mounted controller.

Quick Disconnects Hoses carrying cooling fluid feature self sealing quick disconnects to prevent fluid leakage and its associated inconvenience when disconnecting the chuck.

Kinematic Mounting The hot chuck thermal surface is placed on a dynamic mount that actually minimizes vertical expansion into the probes or probe card.

Cast-in Heating and Cooling Elements Cast-in elements provide for rapid temperature cycling as well as the best temperature uniformity in the industry.

Configurations to Match Your Application
Configure the thermal chuck system to fit your needs including choices of:

Hot only
Hot and Cold
DC driven (lowest noise)
AC driven (quiet and economical)
Coaxial chucks: 6/8/12" (150/200/300mm)
Triaxial chucks: 6/8/12" (150/200/300mm)

Build a System: Select One Item from Each Column

1	2	3
H1000-AC (+400°C 6/8”) (+300°C 300mm)	CHK: AC Chuck 6/8/12" (150/200/300mm) Coaxial or Triaxial	C1000-H (water) C1000-HE (air) C10000-0 (0°C)
H1000-DC (+400°C 6/8”) (+300°C 300mm)	CHK: DC Chuck 6/8/12" (150/200/300mm) Coaxial or Triaxial	C1000-H (water) C1000-HE (air) C10000-0 (0°C)
HC1000-AC (-65/+400°C 6/8”) (-55/+300°C 300mm)	CHK: AC Chuck 6/8/12" (150/200/300mm) Coaxial or Triaxial	HC1000 Heat Transfer Fluid (-65/-50/-45/-30/-15°)
HC1000-DC (-65/+400°C 6/8”) (-55/+300°C 300mm)	CHK: DC Chuck 6/8/12" (150/200/300mm) Coaxial or Triaxial	HC1000 Heat Transfer Fluid (-65/-50/-45/-30/-15°)

H1000 Thermal Chuck System Options

RS232 or IEEE-488 Interface to Controller
pcTC™ Software control
Lift pins for automatic chuck loading
High Voltage up to 5Kv
High Amperage Chucks 10 Amps

Manual Set Up
Manual Set Up mode allows easy control of temperature set points in heat or cool modes. Front panel controls allow the user to enter in the temperature desired, then activate the heat or cool cycle. Cycles may be stopped at any time.

pcTC™ Thermal Chuck Control Software (optional)
Micromanipulator’s pcTC™ Thermal Chuck Control program is a Microsoft Windows™ based, user friendly, graphically based interface program which will allow the control of a variety of thermal chuck systems including those produced by Micromanipulator. The program features common function icons and set point adjust windows for easy set up of heat, soak and cool programs as well as event notification to other concurrently running programs.

H1000 Controllers
All H1000 controllers feature Proportional, Integral, Derivative (PID) control. This method of control has three operational modes operating in conjunction with each other to provide optimum performance in dampening of system response (P), correction for droop between set point and actual process temperature (I), and anticipation of set point approach to minimize over and under shoot (D). The PID algorithms have been tuned to provide maximum efficiency, cycle speed and control accuracy over the thermal chuck system range of temperature.

* Isolation Relays
All H1000 controllers feature isolation relays. The isolation relays in the H1000-AC ensure that all AC voltage is removed when the controller is not in heat mode.

* Controller Safety Features
All H1000 controllers feature state-of-the-art safety features including:
• In addition, a service module and self-sealing quick hose disconnects are provided with cooling modules for routing and control of coolant remotely from controller system minimizing the chance of fluid leakage into the system electronics.
• Over-temperature protection.
• Thermocouple failure runaway protection, including a secondary controller with its own temperature sensor.

* H1000-AC AC Quiet Power Supply/Controller System
The H1000-AC controller features a PID drive which uses AC power (sine wave). The AC power is applied at the “Zero Crossing” point to minimize noise spikes due to abrupt changes in the drive signal. Only a minimal amount of power is used to maintain the set temperature. The result is a very electrically quiet and efficient drive signal to the chuck. For applications where the chuck may be grounded, the AC drive is electrically quiet enough for the most demanding applications.

* H1000-DC DC Low Noise Power Supply/Controller System
The H1000-DC Controller features a LINEAR DC power system. PID control maximizes ramp speed and accuracy and delivers only the minimum power needed to maintain the set temperature. The DC operation coupled with the high electrical isolation of a H1000 series hot chuck provides a thermal chuck system with noise levels as low as 1 fA in the guarded, triaxial mode.

Heat Controllers/Power Supply

Function	H1000-DC	H1000-AC
Control Method	PID, DC Power	PID, Zero Crossing, AC Power
Temperature Range 6/8” Chucks	Ambient to 400°	Ambient to 400°
Temperature Range 300mm Chucks	Ambient to 300°	Ambient to 300°
Temperature Resolution	0.1° C	0.1° C
Temperature Stability	0.1° C	0.1° C
Over-temperature Protection	Max +25° C	Max +25° C
Status Indicators	Heating Fault % Deviation % Power Applied	Heating Fault % Deviation % Power Applied
Computer Control (Standard)	RS-422	RS-422
Computer Control (Optional)	RS-232, IEEE-488	RS-232, IEEE-488
Operational Modes	Manual or Computer Control	Manual or Computer Control

Cooling Systems:
The C1000-H and C1000-HE cooling systems provide fast cool down of the thermal chuck. Temperature control is provided by the heat controller when in heat mode. The C1000-C-0 system provides fast cool down of the thermal chuck as well as temperature control to 0° C. Cooling systems receive power from the H1000 heat systems and operate in conjunction with those controllers to provide operation over the full system temperature range. Automatic purging after cool down is provided with the ambient cooling systems. The zero degree cooling system provides automatic purging when the chuck temperature rises 1.5° C above the cool set point temperature. Manual purging is available with all cooling options.

H1000 System Cooling Systems
C1000-V0-H Laboratory Water Ambient Cooling System The C1000-V0-H cooling control module is an economical way to quickly cool the thermal chuck using water supplied by the user. Cooling water is automatically purged in the chuck after the cooling set point temperature is reached. Water continually flows in the external thermal shield around the chuck. The water used to cool the chuck and thermal shield ring is lost in an open drain (no back pressure). The control module is designed to be located external to the electronic control equipment to eliminate the danger of fluid leaks causing equipment damage. Thermal chuck control at the lowest temperature is 10 to 15°C above the water temperature.

C1000-HE Radiator Air Ambient Cooling System
The C1000-HE is operationally equivalent to the C1000-V0-H cooling module. The heat exchanger however, is fully self-contained and eliminates the need for the user to supply cold water and drain to cool the thermal chuck. The heat exchanger uses a glycol and water heat transfer fluid for both the thermal chuck and the external thermal shield around the chuck. The heat transfer fluid is passed through a radiator unit which is air cooled. Precise temperature control is achieved at 10 to 15° above the air temperature.

C1000-C-0 Zero Degree Chiller System
The zero degree chiller provides chuck cooling capability down to zero degrees Celsius. The zero degree chiller may be set to -10°C to allow precise temperature control to 0°C. The chiller has the ability to set the chiller fluid temperature from -10°C to near ambient. The chuck heat transfer liquid is glycol and water. The fluid from the chiller is also used to cool the external thermal shield around the chuck.

HC1000 Ultra-Low Temperature Control/Chiller System
The HC1000 System is an integrated temperature control product which has the capability of controlling the temperature of the thermal chuck through the range of -65° C to +400° C for 4, 6 and 8” chucks and through a range of -55°C to +300°C for 300mm chucks. The HC1000 system incorporates the same heating technology that is used in H1000 System and is available in either AC or DC configurations. A two-stage chiller system is used to provide a source of chilled heat transfer fluid to control the thermal chuck temperature to the lowest levels. Temperature resolution is 0.1°C when the heat transfer fluid is 10 to 15°C below the test temperature. The heat transfer fluid which is used for the low temperature chiller is Galden type fluid or methanol. The heat transfer fluid for the cooling shield around the chuck is a mixture of glycol and water.

Cooling Systems

Function	C1000-H	C1000-HE	C1000-C-0	HC1000
Control Method	On/Off	On/Off	PID	PID
Heat Transfer Fluid: Chuck	Water	Glycol/Water	Glycol/Water	Galden
Thermal Shield Fluid:	Water	Glycol/Water	Glycol/Water	Glycol/Water
Lowest Temperature	Water Temperature	Air Temperature	-10°C	-75°C
Temperature Resolution*	1.0° C	1.0° C	0.1°C	0.1°C