Hot Chuck

A Hot Chuck Designed for Your Probe Station

Product Documentation: micromanipulator-h1000-thermal-chuck-systems

At Micromanipulator we pioneered the integration of hot chuck systems with probe stations. Today we continue to lead the industry with the broadest available temperature range and the most advanced, non-operator dependent performance available on the market. Our exclusive H1000 series thermal chuck offers customers the best planarity, lowest noise, and lowest cost of ownership. In addition all control options work with our probing specialized thermal chuck. With several configurations, you will find it easy to get the right hot chuck system that meets your probing application and budget needs.

Hot Chuck Systems – Available with Options

Our innovative hot chuck systems support wafer testing from -65 to 400 degrees C and offer customers a choice of the heating power supply. The AC heating supply is for fast heating when chuck noise in the femtoamp level is not needed, and the DC heating supply allows you to achieve the very lowest level measurements. Any of Micromanipulator’s hot chucks are available to support 150 to 300 mm wafers in coaxial or triaxial configurations.

The hot chucks are also available with a choice of three cooling options. Our C1000 simple heat exchanger (HE) cooling is the economical choice for high (above ambient) testing and provides rapid cool down of the chuck after a heat cycle is finished. The C1000 zero degree option is for testing to zero degrees C Finally our HC1000 high performance cooling system is used to test at temperatures down to -65 degrees C.

We welcome questions and inquiries into our products and offer a worldwide network of service support engineers that provide “system level” support. For assistance regarding your application, please contact one of our engineers.

As leaders in the field, the Micromanipulator Company invented analytical probing back in 1956. Ever since then, we have reliably delivered the tools and life cycle support the semiconductor industry depends on. Part of our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. Contact us to learn more the several configurations offered for our innovative hot chuck.

Hot Chuck