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550/560VM Right Hand Vacuum Base Manipulator


Right hand vacuum base manipulator.  For probing > 1-micron geometries


Manipulator, right hand (XYZ controls forward facing when placed on right side of probing setup).  Arching motion.  Recommended for probing > 1-micron geometries.  100 T.P.I XYZ drive.  Requires probe holder (order separately).  High profile base for use on probe stations with the wafer chuck above the platen.  Requires customer supplied vacuum.