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550/660VM90 Right Hand Vacuum Base Manipulator


Right hand vacuum base manipulator.  For probing > 1-micron geometries


Manipulator, right hand (XYZ controls forward facing when placed on right side of probing setup).  Arching motion.  Recommended for probing > 1-micron geometries.  100 T.P.I XYZ drive.  Requires probe holder (order separately) Low profile base for use on probe stations with the wafer chuck is below the platen.  Requires customer supplied vacuum.