P200A (200mm) Semi Automatic Probe Station

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  • Highest performance 200mm semiautomatic probe station available on the market
  • Comprehensive software suite
  • The best low current, sub-micron, and temperature probing performance
  • Comprehensive accessory support
  • Hot and Cold thermal chucks (field upgradeable)
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Description

P200A 200mm Semiautomatic Probe Station

The P200A probe station is the most stable, intuitive, and versatile 200mm semi-automatic analytical probe station available today. Designed for low current, sub-micron positioning applications, the P200A comes standard with features such as single-point ground, dry/dark environment, and integrated thermal chuck plumbing. Built for reliability as well as precision, the P200A features closed-loop operation with massive stage and platen drives, a robust chuck mount and a harmonic theta drive.

The P200A uses netProbeTM, Micromanipulator’s revolutionary prober control software. Navigator, Inter-active Video, Memory List, Wafer Map and Setup modules provide full functionality with a wealth of high level features including Video Positioning and Snap Alignment, Die to Die and In-Die stepping, and a full library of prober interfaces for popular parametric test programs.

Joystick control allows for easy and quick operation when programmability is not required. The joystick intuitively operates the station stage, platen (Z), and theta as well as the microscope X-Y and Z drives locally to the probe station hardware. The P200A is the station of choice for a high performance, full capability 200 mm semi-automatic probe station.

Product Documents

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