P200L Semi-Automatic Probe Station

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  • 200mm semiautomatic wafer prober
  • Optional NETPROBE-7 control software with wafer map, integrated video, theta alignment, sub-die, and pattern recognition
  • Drivers available for popular testers companies including Keysight, Keithley, and LabVIEW
  • Configurable for DC, RF, Microwave, and High Power applications
  • -65C to 400C configurable

Description

The Micromanipulator P200L 200mm semiautomatic probe station comes standard with features such as single-point ground and integrated thermal chuck plumbing. Built for reliability as well as precision, the P200L features leadscrew – leadnut stage and platen drives, a stainless steel platen with removable front wedge and high stability microscope bridge that supports all high resolution long-working distance microscopes.

Customize your P200L for two popular host control methods:

  • Direct to the standard non-Windows based controller, or
  • Direct to the optional NetProbe 7 software to unleash the power of an included wafer map, integrated video, theta alignment, sub-die, and pattern recognition

The standard P200L ‘s versatile Non-windows based controller supports USB or GPIB, (depending on ordered configuration) communications. The stage X-Y and platen (Z) are motorized / programmable. Microscope motion is manual. The system may be controlled via scripts and all popular parametric test analytical prober drivers. An indexing script with user GUI and a Labview VI is provided allowing use of the system right out of the box.

Standard joystick control allows for easy and quick operation when programmability is not required. The joystick intuitively operates the station stage and platen.

The P200L may be configured with a local dry / shielded / dark environment and “Top Hat” for low level or low temperature, frost free probing. Three temperature ranges are supported:

  • Ambient (room temperature) to 400C
  • 0C to 400C
  • -65C to 400C

The P200L is the station of choice for a high performance, full capability and cost-effective 200 mm semi-automatic probe station.

Additional information

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Product Documents

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